The
MiniLab 060 is a new concept in vacuum deposition.
Created by an experienced team of designers with a background
in UHV deposition technology, the Minilab 060 is
a fully integrated mini box coater that achieves professional
results.
Problems
associated with cramped multi-technique box coater systems
have been overcome and miniaturised. Because MiniLab
was designed as a multi-technique system from the start,
it is able to adapt to configurations that many larger coating
units find impossible to attain.
The
chamber is a development of Moorfields popular MINIBOX
E306 retrofit. All stainless steel construction, it has
twenty five one inch base ports to facilitate rapid customisation
and flexibility of source and accessory positions. Two NW70CF
wall ports provide options for front side sample heating,
fast action shutter, thin film head, gas admission and optical
access to the sample. Three NW70CF top ports provide options
for sample rotation / positioning, sample heating, thermocouple
and sample bias. The door window port has visual sample
and source access with optional window shutter. The large
rear NW200CF port ensures good conductivity for fast pump
down.
The
MiniLab can be configured for true multi-technique,
multi-layer deposition processes making it ideal for small
scale production and R&D prototyping. A fully loaded system
would, for example, include the following techniques: a
4 pocket E-Beam source with water cooling, HT and rotation
device; a 4 filament thermal source with high current feed
throughs with discrete filament selection; a TORUS "flexihead"
magnetron for sputtering, a thin film monitor / controller;
a variable speed rotary sample plate; back side graphite
sample heating (to 1200°C) or quartz lamp heating ( front
or back); plasma cleaning/ dry etch option; box shielding;
sample shutter.
With
the maximum sample size a whopping 370mm o/d MiniLab
competes with major OEM system designs but at a fraction
of the price. Sample change is rapid due to the simple quick
release sample plate and boss arrangement.
Standard
pumping is by way of a 500 l/sec turbo molecular pump and
dual stage rotary mechanical backing, roughing pump. An
additional cryo panel can be mounted in front of the turbo
if high gas loads are experienced. Other pumping options
are available.
Vacuum
control is one button start / vent, catered for by an onboard
PLC which can update the system control menu with real-time
status.
Utilising
the latest film monitor and control systems, the user is
able to set multi-layer runs and control each step of the
process and data log events for off line post analysis.
The control system is supplied with off line software for
setting up of film runs without the need to suffer down
time.
Most
importantly, the Minilab 060 is cost effective. The
modular design concept allows for retrofit additions as
and when the budget allows. The Minilab chamber readily
accepts components from OEMs so the user is not forced into
expensive proprietary purchases
Minilab
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