Detectable Leak:-
Massive: 9x10² - 1x10-4 mbar ls-1
Gross: 9x10-1 – 3x10-9 mbar ls-1
Fine: 9x10-3 – 2x10-11 mbar ls-1
High Sensitivity: 9x10-4 – 2x10-12 mbar ls-1
Pumping System:-
Rotary Roughing: E2M18 fitted with internal EMF20 oil mist filter and standard roughing
Rotary Pump: E2M1.5 fitted with EMF10 oil mist filter and Visco probe connection port
Diffusion Pump: E203D with liquid nitrogen cold trap, high sensitivity accumulator fitted
Dimensions:-
Length: 685 mm
Width: 580 mm
Height: 1200 mm