Vacuum History

	Vacuum Industry	Year	Equipment Develoment	Credit
		1643	Mercury Barometer	Torricelli
		1849	Bourdon Gauge	Bourdon
Founded	L e y b o l d	1850
Founded	Heraeus	1851
		1855	Mercury piston pump	Geissler
		1865	Mercury siphon pump	Sprengel
		1874	McLeod mercury vacuum gauge	Herbert G. Mcleod
Founded	Becker	1885
Founded	Pf eif fer	1890
Founded	S t o k e s Machine Co.	1895
		1906	Pirani vacuum gauge	Pirani
			Thermocouple vacuum gauge	Voege
		1910	General use of oil-sealed rotary vane vacuum pumps
		1913	Mercury vapour diffusion pump	Langmuir, Gaede
			Molecular drag pump	Gaede, Holweck
		1916	Hot cathode ionization gauge	Buckley
		1917	Bourdon vacuum gauge	Lorenz
Founded	E d w a r d s H i g h V a c.	1919
		1924	Rotary piston vacuum pump	S t o k e s Co.
		1926	Oil in diffusion pump	Burch, Hickma
		1929	Capacitance manometer	Olsen & Hurst
Founded	CVC Div.	1934
Founded	Carbolite	1938	Liquid air cold traps on diffusion pumps
		1943	Mass spectrometer leak detector	Backus, Noir, Manhattan Project
Founded	Ba l ze r s	1946
Founded	LTE	1947
Founded	Var ian Associates	1948
Founded	CVC	1952
Founded	CVT	1953	Better pumping with evaporated Ti	Herb
		1954	Hot cathode Magnetron vacuum gauge	Conn & Daglish
		1955	Commercial Roots Vacuum Pump	Leybold, Philander and Francis Marion Roots
		1957	Turbo mole cular pump	Becker, Pfeiffer
Founded	Kinney Vacuum	1958	First Pf eif fer turbo molecular pump	Pf eif fer
		1958	First Integrated Circuit (Germanium)	Jack Kilby (Texas Inst.)
		1958	Second Integrated Printed Circuit (Silicon)	Robert Noyce, Traitorous Eight, (Fairchild)
		1959	Sputter ion pump	Hall, Varian
Founded	Var ian Vacuum Div.	1959	Cold cathode Magnetron vacuum gauge	Penning
Founded	MKS Instuments	1961	Modern capacitance manometer gauge	Wolfe
Founded	Var ian
Founded	A l c a t e l	1962
		1962	A partial pressure of 10^-17mbar is measured with magnetic-sector mass spectrometer	William D. Davis
Founded	B u s c h	1963
Founded	V A T	1964
Founded	C T I Cryogenics	1967
		1969	Association of Vacuum Equipment Manufacturers AVEM Founded	AVEM
Merged	L e y b o l d & Heraeus
Founded	H V A	1973
Founded	Polycold	1974
		1978	Line of lobe booster blowers introduced	S t o k e s Co.
Founded	Espec	1980	Thermal FM/MFC instruments	MKS
Founded	Aerzen	1983
Founded	S t o k e s Vacuum Div.	1988
		1989	All metal MFCs	MKS
Founded	Eb ara	1990
		1992	Hybrid turomolecular/molecular drag pump
		1994	Mini Baratron	MKS
Founded	Ch ell Div.	1995
Acquires	E d w a r d s, S t o k e s	2001

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